Rutherford scattering or Rutherford Back Scattering (rbs) is a technique to learn about the identity and quantity of atoms near the surface of a sample using the scattering of positive particles by the nucleus. The positive particles directed at the sample are usually helium ions.
Rutherford backscattering traces back to the discovery of the technique used to discover the nucleus by Ernest Rutherford, Hans Geiger, and Ernest Marsden. They directed alpha particles (helium nuclei or He2+ ions) at thin metal sheets and examined the pattern of scattered alpha particles. The scattering was due to the presence of the nucleus.